Inventor

ARNOU PANAGIOTA

BE2 patents

Patents

2 patents

US11898243B2Feb 13, 2024

Method of forming vanadium nitride-containing layer

ASM IP HOLDING BV2 citations69

US12448683B2Oct 21, 2025

Method of forming a vanadium nitride-containing layer

ASM IP HOLDING BV0 citations59