Inventor
KAMP THOMAS A
US3 patents
Patents
3 patentsUS7186661B2Mar 6, 2007
Method to improve profile control and N/P loading in dual doped gate applications
LAM RES CORP6 citations71
US7098141B1Aug 29, 2006
Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structures
LAM RES CORP7 citations70
US7682980B2Mar 23, 2010
Method to improve profile control and N/P loading in dual doped gate applications
LAM RES CORP3 citations61