Inventor

RUI ZHAO YA

SG2 patents

Patents

2 patents

US6866182B2Mar 15, 2005

Apparatus and method to prevent oxidation of electronic devices

ASM TECH SINGAPORE PTE LTD21 citations90

US7578423B1Aug 25, 2009

Assembly for reducing oxidation of semiconductor devices

ASM TECH SINGAPORE PTE LTD8 citations75