Inventor

SAKAMOTO KEITARO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SAKAMOTO KEITARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAKAMOTO KEITARO

1 patent

US8431996B2Apr 30, 2013

Plasma processing apparatus and method of producing amorphous silicon thin film using same

SAKAMOTO KEITARO5 citations62

KOMORI TSUNENORI

1 patent

US9243327B2Jan 26, 2016

Plasma CVD device and method of manufacturing silicon thin film

KOMORI TSUNENORI1 citations39