Inventor
ZHU QINGHUA
MO3 patents
Patents
3 patentsUS10134613B2Nov 20, 2018
Cluster tool apparatus and a method of controlling a cluster tool apparatus
UNIV MACAU SCI & TECH2 citations69
US10001772B2Jun 19, 2018
Optimally scheduling of close-down process for single-arm cluster tools with wafer residency time constraints
UNIV MACAU SCI & TECH0 citations38
US10001773B2Jun 19, 2018
Optimal one-wafer scheduling of single-arm multi-cluster tools with tree-like topology
UNIV MACAU SCI & TECH0 citations38