Inventor
MINAMI TOMOHIDE
JP27 patents
⚠️ This page may combine multiple inventors who share the name “MINAMI TOMOHIDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
25 patentsUS6371667B1Apr 16, 2002
Film forming method and film forming apparatus
TOKYO ELECTRON LTD76 citations96
US6884294B2Apr 26, 2005
Coating film forming method and apparatus
TOKYO ELECTRON LTD16 citations92
US6796054B2Sep 28, 2004
Low-pressure dryer and low-pressure drying method
TOKYO ELECTRON LTD30 citations92
US6776845B2Aug 17, 2004
Coating film forming method and system
TOKYO ELECTRON LTD16 citations92
US6238109B1May 29, 2001
Processing solution supply apparatus
TOKYO ELECTRON LTD34 citations92
US9903739B2Feb 27, 2018
Sensor chip for electrostatic capacitance measurement and measuring device having the same
TOKYO ELECTRON LTD9 citations83
US9841395B2Dec 12, 2017
System of inspecting focus ring and method of inspecting focus ring
TOKYO ELECTRON LTD8 citations83
US7994793B2Aug 9, 2011
Jig for detecting position
TOKYO ELECTRON LTD18 citations83
US7024798B2Apr 11, 2006
Low-pressure dryer and low-pressure drying method
TOKYO ELECTRON LTD10 citations74
US6986214B2Jan 17, 2006
Low-pressure dryer and low-pressure drying method
TOKYO ELECTRON LTD9 citations74
US9970838B2May 15, 2018
Pressure measuring device and pressure measuring method
TOKYO ELECTRON LTD5 citations73
US7488505B2Feb 10, 2009
Coating film forming method and system
TOKYO ELECTRON LTD6 citations73
US11841278B2Dec 12, 2023
Temperature measurement sensor, temperature measurement system, and temperature measurement method
TOKYO ELECTRON LTD2 citations72
US10837991B2Nov 17, 2020
Electrostatic capacitance measuring device
TOKYO ELECTRON LTD2 citations72
US10074549B2Sep 11, 2018
Method for acquiring data indicating electrostatic capacitance
TOKYO ELECTRON LTD2 citations72
US7923665B2Apr 12, 2011
Temperature measuring device and method for measuring wafer-type thermometers
TOKYO ELECTRON LTD4 citations63
US11460355B2Oct 4, 2022
Antenna device and temperature detection method
TOKYO ELECTRON LTD0 citations62
US7977609B2Jul 12, 2011
Temperature measuring device using oscillating frequency signals
TOKYO ELECTRON LTD4 citations62
US7510611B2Mar 31, 2009
Coating film forming method and apparatus
TOKYO ELECTRON LTD4 citations62
US9709453B2Jul 18, 2017
Pressure sensor and method for manufacturing the same
TOKYO ELECTRON LTD0 citations52
US9702038B2Jul 11, 2017
Pressure sensor and method for manufacturing the same
TOKYO ELECTRON LTD0 citations52
US10018484B2Jul 10, 2018
Sensor chip for electrostatic capacitance measurement and measuring device having the same
TOKYO ELECTRON LTD1 citations51
US11114321B2Sep 7, 2021
Apparatus and method for real-time sensing of properties in industrial manufacturing equipment
TOKYO ELECTRON LTD0 citations47
US10837810B2Nov 17, 2020
Method for calibrating measuring device and case used in the calibration method
TOKYO ELECTRON LTD0 citations41
US10634479B2Apr 28, 2020
Measuring instrument for measuring electrostatic capacity and method of calibrating transfer position data in processing system by using measuring instrument
TOKYO ELECTRON LTD0 citations41