Inventor
OOKURA JUN
JP15 patents
Patents
15 patentsUS6402509B1Jun 11, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD53 citations96
US6884294B2Apr 26, 2005
Coating film forming method and apparatus
TOKYO ELECTRON LTD16 citations92
US6776845B2Aug 17, 2004
Coating film forming method and system
TOKYO ELECTRON LTD16 citations92
US6686571B2Feb 3, 2004
Heat treatment unit, cooling unit and cooling treatment method
TOKYO ELECTRON LTD24 citations92
US6644965B2Nov 11, 2003
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD43 citations92
US6507770B2Jan 14, 2003
Substrate processing system and substrate processing method
TOKYO ELECTRON LTD47 citations92
US6461438B1Oct 8, 2002
Heat treatment unit, cooling unit and cooling treatment method
TOKYO ELECTRON LTD34 citations92
US6973370B2Dec 6, 2005
Substrate processing apparatus and method for adjusting a substrate transfer position
TOKYO ELECTRON LTD23 citations91
US6654668B1Nov 25, 2003
Processing apparatus, processing system, distinguishing method, and detecting method
TOKYO ELECTRON LTD36 citations91
US7868270B2Jan 11, 2011
Temperature control for performing heat process in coating/developing system for resist film
TOKYO ELECTRON LTD7 citations82
US7488505B2Feb 10, 2009
Coating film forming method and system
TOKYO ELECTRON LTD6 citations73
US6332751B1Dec 25, 2001
Transfer device centering method and substrate processing apparatus
TOKYO ELECTRON LTD11 citations72
US6620245B2Sep 16, 2003
Liquid coating apparatus with temperature controlling manifold
TOKYO ELECTRON LTD12 citations69
US7510611B2Mar 31, 2009
Coating film forming method and apparatus
TOKYO ELECTRON LTD4 citations62
US7755003B2Jul 13, 2010
Temperature control for performing heat process on resist film
TOKYO ELECTRON LTD5 citations61