Inventor
FIEN MENNO
NL6 patents
Patents
6 patentsUS9507275B2Nov 29, 2016
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US7561250B2Jul 14, 2009
Lithographic apparatus having parts with a coated film adhered thereto
ASML NETHERLANDS BV9 citations82
US6721036B2Apr 13, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV16 citations74
US10747125B2Aug 18, 2020
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations72
US10120292B2Nov 6, 2018
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US7148950B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57