Inventor
VAN BEIJNUM MAARTEN
NL3 patents
Patents
3 patentsUS9507275B2Nov 29, 2016
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US10747125B2Aug 18, 2020
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations72
US10120292B2Nov 6, 2018
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72