Inventor
PAPKE KEVIN A
US11 patents
Patents
11 patentsUS9914999B2Mar 13, 2018
Oxidized showerhead and process kit parts and methods of using same
APPLIED MATERIALS INC10 citations84
US10941303B2Mar 9, 2021
Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components
APPLIED MATERIALS INC4 citations71
US10583465B2Mar 10, 2020
30 nm in-line LPC testing and cleaning of semiconductor processing equipment
APPLIED MATERIALS INC4 citations70
US10921251B2Feb 16, 2021
Chamber component part wear indicator and a system for detecting part wear
APPLIED MATERIALS INC1 citations61
US10233554B2Mar 19, 2019
Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment
APPLIED MATERIALS INC1 citations59
US11810766B2Nov 7, 2023
Protection of aluminum process chamber components
APPLIED MATERIALS INC0 citations57
US11591689B2Feb 28, 2023
Method for fabricating chamber parts
APPLIED MATERIALS INC0 citations57
US11239058B2Feb 1, 2022
Protective layers for processing chamber components
APPLIED MATERIALS INC0 citations57
US10883972B2Jan 5, 2021
Coating tester using gas sensors
APPLIED MATERIALS INC0 citations56
US11118263B2Sep 14, 2021
Method for forming a protective coating film for halide plasma resistance
APPLIED MATERIALS INC0 citations53
US10253406B2Apr 9, 2019
Method for forming yttrium oxide on semiconductor processing equipment
APPLIED MATERIALS INC0 citations49