Inventor
KUO YU-WEI
TW11 patents
⚠️ This page may combine multiple inventors who share the name “KUO YU-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS10504738B2Dec 10, 2019
Focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83
US11569125B2Jan 31, 2023
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11195750B2Dec 7, 2021
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10707123B2Jul 7, 2020
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11854873B2Dec 26, 2023
Etch profile control of interconnect structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11075087B2Jul 27, 2021
Focus ring for plasma etcher
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
EPISTAR CORP
4 patentsUS9705035B1Jul 11, 2017
Light emitting device
EPISTAR CORP6 citations81
US11557694B2Jan 17, 2023
Light emitting device
EPISTAR CORP3 citations70
US10930818B2Feb 23, 2021
Light emitting device
EPISTAR CORP1 citations70
US10043945B2Aug 7, 2018
Method of manufacturing a light emitting device
EPISTAR CORP0 citations49