Inventor
YAGI SHOUJI
JP4 patents
Patents
4 patentsUS6844744B2Jan 18, 2005
Surface shape recognition sensor and method of manufacturing the same
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US6468895B2Oct 22, 2002
Pattern forming method
NIPPON TELEGRAPH & TELEPHONE2 citations61
US6743653B2Jun 1, 2004
Micromachine manufacturing method
NIPPON TELEGRAPH & TELEPHONE4 citations60
US7189625B2Mar 13, 2007
Micromachine and manufacturing method
NIPPON TELEGRAPH & TELEPHONE0 citations50