Inventor
HOUCHIN RYUZOU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “HOUCHIN RYUZOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OKITA SHOGO
3 patentsUS8231798B2Jul 31, 2012
Plasma processing apparatus and plasma processing method
OKITA SHOGO7 citations82
US8591754B2Nov 26, 2013
Plasma processing apparatus and plasma processing method
OKITA SHOGO1 citations60
US8563332B2Oct 22, 2013
Wafer reclamation method and wafer reclamation apparatus
OKITA SHOGO0 citations40