Inventor
KOO KYUNG-BUM
KR7 patents
⚠️ This page may combine multiple inventors who share the name “KOO KYUNG-BUM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
5 patentsUS6908848B2Jun 21, 2005
Method for forming an electrical interconnection providing improved surface morphology of tungsten
SAMSUNG ELECTRONICS CO LTD55 citations92
US6451691B2Sep 17, 2002
Methods of manufacturing a metal pattern of a semiconductor device which include forming nitride layer at exposed sidewalls of Ti layer of the pattern
SAMSUNG ELECTRONICS CO LTD7 citations72
US8366827B2Feb 5, 2013
Chamber inserts and apparatuses for processing a substrate
SAMSUNG ELECTRONICS CO LTD5 citations68
US7494917B2Feb 24, 2009
Method for forming an electrical interconnection providing improved surface morphology of tungsten
SAMSUNG ELECTRONICS CO LTD1 citations48
US9412842B2Aug 9, 2016
Method for fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations41