Inventor

UMEKI Kazuto

TW2 patents

Patents

2 patents

US11476136B2Oct 18, 2022

Substrate processing apparatus and method of adjusting substrate processing apparatus

TOKYO ELECTRON LTD0 citations57

US10504757B2Dec 10, 2019

Substrate processing apparatus and method of adjusting substrate processing apparatus

TOKYO ELECTRON LTD0 citations47