Inventor
KINOSHITA MORIYOSHI
JP3 patents
Patents
3 patentsUS11367642B2Jun 21, 2022
Substrate processing apparatus and purging method
TOKYO ELECTRON LTD3 citations70
US10978322B2Apr 13, 2021
Transfer device, substrate processing apparatus, and transfer method
TOKYO ELECTRON LTD0 citations51
US10529608B2Jan 7, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations30