Inventor
KANEKO KENTO
DE3 patents
Patents
3 patentsUS10688524B2Jun 23, 2020
Method for coating a substrate and coating device
SUSS MICROTEC LITHOGRAPHY GMBH4 citations65
US11247229B2Feb 15, 2022
Method for coating a substrate with a lacquer and device for planarising a lacquer layer
SUSS MICROTEC LITHOGRAPHY GMBH0 citations54
US10232405B2Mar 19, 2019
Method for coating a substrate with a lacquer and device for planarising a lacquer layer
SUSS MICROTEC LITHOGRAPHY GMBH0 citations44