Inventor

SHERWOOD MICHAEL T

US4 patents

⚠️ This page may combine multiple inventors who share the name “SHERWOOD MICHAEL T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US5795215AAug 18, 1998

Method and apparatus for using a retaining ring to control the edge effect

APPLIED MATERIALS INC243 citations98

US5681215AOct 28, 1997

Carrier head design for a chemical mechanical polishing apparatus

APPLIED MATERIALS INC222 citations98

US6019670AFeb 1, 2000

Method and apparatus for conditioning a polishing pad in a chemical mechanical polishing system

APPLIED MATERIALS INC138 citations95

SHENDON NORMAN

1 patent

USRE44491ESep 10, 2013

Chemical mechanical polishing retaining ring

SHENDON NORMAN4 citations68