Inventor

BOEGLI VOLKER

US3 patents

⚠️ This page may combine multiple inventors who share the name “BOEGLI VOLKER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6556702B1Apr 29, 2003

Method and apparatus that determines charged particle beam shape codes

APPLIED MATERIALS INC64 citations94

US6828570B2Dec 7, 2004

Technique for writing with a raster scanned beam

APPLIED MATERIALS INC2 citations52

ETEC SYSTEMS INC

1 patent

US6259106B1Jul 10, 2001

Apparatus and method for controlling a beam shape

ETEC SYSTEMS INC40 citations90