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Inventor
DANBATA MASAYOSHI
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “DANBATA MASAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU DENSHI KINZOKU KK
2 patents
US6217650B1
Apr 17, 2001
Epitaxial-wafer fabricating process
KOMATSU DENSHI KINZOKU KK
12 citations
72
US7147710B2
Dec 12, 2006
Method of manufacturing epitaxial silicon wafer
KOMATSU DENSHI KINZOKU KK
1 citations
46
KOMATSU DENSHI SINZOKU KABUSHI
1 patent
US6800132B1
Oct 5, 2004
Silicon wafer and method for manufacture thereof, and method for evaluation of silicon wafer
KOMATSU DENSHI SINZOKU KABUSHI
3 citations
52
DANBATA MASAYOSHI
1 patent
US8558990B2
Oct 15, 2013
Method of exposing a semiconductor wafer and exposure apparatus
DANBATA MASAYOSHI
0 citations
38
ELPIDA MEMORY INC
1 patent
US7495457B2
Feb 24, 2009
Semiconductor device evaluation method and apparatus using the same
ELPIDA MEMORY INC
0 citations
36