Inventor
LU BO-JOU
TW3 patents
Patents
3 patentsUS11043460B2Jun 22, 2021
Measurement method of overlay mark structure
UNITED MICROELECTRONICS CORP0 citations58
US10811362B2Oct 20, 2020
Overlay mark structure and measurement method thereof
UNITED MICROELECTRONICS CORP1 citations58
US7633601B2Dec 15, 2009
Method and related operation system for immersion lithography
UNITED MICROELECTRONICS CORP0 citations34