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Inventor
KNAPPICH MATTHIAS
DE
2 patents
Patents
2 patents
US8969835B2
Mar 3, 2015
Particle beam system including a supply of process gas to a processing location
ZEISS CARL MICROSCOPY GMBH
10 citations
78
US8704195B2
Apr 22, 2014
Method for setting a position of a carrier element in a particle beam device
ZEISS CARL MICROSCOPY GMBH
0 citations
31