Inventor
KANKANALA PENCHALA N
US5 patents
⚠️ This page may combine multiple inventors who share the name “KANKANALA PENCHALA N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS11087998B2Aug 10, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US10971381B2Apr 6, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US9429248B2Aug 30, 2016
Process chamber gas flow apparatus, systems, and methods
APPLIED MATERIALS INC2 citations56