Inventor

KOK HAICO VICTOR

NL32 patents

⚠️ This page may combine multiple inventors who share the name “KOK HAICO VICTOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOK HAICO VICTOR

ASML NETHERLANDS BV

Apodization measurement for lithographic apparatus

Sensor for use in a lithographic apparatus

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Metrology method and associated metrology and lithographic apparatuses

Sensor and lithographic apparatus

Sensor for use in a lithographic apparatus

Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program

Device manufacturing method and lithographic apparatus

Apodization measurement for lithographic apparatus

Method of determining aberration of a projection system of a lithographic apparatus

Lithographic apparatus, method of determining properties thereof and computer program

Sensor, lithographic apparatus, and device manufacturing method

Lithographic method to apply a pattern to a substrate and lithographic apparatus

Lithographic method to apply a pattern to a substrate and lithographic apparatus

Lithographic apparatus, device manufacturing method, and device manufactured thereby

Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor

Wave front sensor with grey filter and lithographic apparatus comprising same

Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

Lithographic method to apply a pattern to a substrate and lithographic apparatus

Sensor system for lithography

Sensor system for lithography

Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method

Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor

Sensor, lithographic apparatus and device manufacturing method

Sensor, lithographic apparatus and device manufacturing method

ASML HOLDING NV

Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby

Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus

CORBEIJ WILHELMUS MARIA

Lithographic apparatus and device manufacturing method

KOK HAICO VICTOR

Lithographic method to apply a pattern to a substrate and lithographic apparatus

VAN DE KERKHOF MARCUS ADRIANUS

Lithographic apparatus and sensor therefor

VOOGD ROBBERT JAN

Lithographic apparatus and method