Inventor
VAN DE LAAK RON
NL3 patents
Patents
3 patentsUS7409302B2Aug 5, 2008
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
ASML NETHERLANDS BV6 citations70
US7308368B2Dec 11, 2007
Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program
ASML NETHERLANDS BV5 citations68
US7773235B2Aug 10, 2010
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
ASML NETHERLANDS BV1 citations56