Inventor
KUIPER JOHANNES MARIA
NL3 patents
⚠️ This page may combine multiple inventors who share the name “KUIPER JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
2 patentsUS7409302B2Aug 5, 2008
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
ASML NETHERLANDS BV6 citations70
US7773235B2Aug 10, 2010
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
ASML NETHERLANDS BV1 citations56