Inventor
CHEN HSIEN TSE
TW2 patents
Patents
2 patentsUS12249526B2Mar 11, 2025
Detecting damaged semiconductor wafers utilizing a semiconductor wafer sorter tool of an automated materials handling system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11600504B2Mar 7, 2023
Detecting damaged semiconductor wafers utilizing a semiconductor wafer sorter tool of an automated materials handling system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50