Inventor
LU CHAO-PO
TW5 patents
⚠️ This page may combine multiple inventors who share the name “LU CHAO-PO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9527721B2Dec 27, 2016
Movement microelectromechanical systems (MEMS) package
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations81
US11289311B2Mar 29, 2022
Method and apparatus for reducing vacuum loss in an ion implantation system
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11764042B2Sep 19, 2023
Method and apparatus for reducing vacuum loss in an ion implantation system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11569062B2Jan 31, 2023
Gas delivery system for ion implanter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49