Inventor

EICHELBERGER BRAD

US2 patents

Patents

2 patents

US7678516B2Mar 16, 2010

Test structures and methods for monitoring or controlling a semiconductor fabrication process

KLA TENCOR TECH CORP12 citations79

US7679069B2Mar 16, 2010

Method and system for optimizing alignment performance in a fleet of exposure tools

KLA TENCOR TECH CORP2 citations61