Inventor

BARANYAI MATHIAS

DE2 patents

⚠️ This page may combine multiple inventors who share the name “BARANYAI MATHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

1 patent

US7704889B2Apr 27, 2010

Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurements

ADVANCED MICRO DEVICES INC0 citations46

SCHALLER MATTHIAS

1 patent

US8888947B2Nov 18, 2014

Method and system for advanced process control in an etch system by gas flow control on the basis of CD measurements

SCHALLER MATTHIAS0 citations45