Inventor
KONDUPARTHI DEEPASREE
US3 patents
Patents
3 patentsUS9136131B2Sep 15, 2015
Common fill of gate and source and drain contacts
GLOBALFOUNDRIES INC6 citations66
US9159567B1Oct 13, 2015
Replacement low-K spacer
GLOBALFOUNDRIES INC3 citations60
US9299584B2Mar 29, 2016
Methods of forming integrated circuits with a planarized permanent layer and methods for forming FinFET devices with a planarized permanent layer
GLOBALFOUNDRIES INC0 citations45