Inventor
BOYLE JAMES E
US17 patents
⚠️ This page may combine multiple inventors who share the name “BOYLE JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED MATERIALS INC
13 patentsUS6450346B1Sep 17, 2002
Silicon fixtures for supporting wafers during thermal processing
INTEGRATED MATERIALS INC68 citations95
US6617225B2Sep 9, 2003
Method of machining silicon
INTEGRATED MATERIALS INC15 citations92
US6455395B1Sep 24, 2002
Method of fabricating silicon structures including fixtures for supporting wafers
INTEGRATED MATERIALS INC39 citations92
US6979659B2Dec 27, 2005
Silicon fixture supporting silicon wafers during high temperature processing
INTEGRATED MATERIALS INC13 citations83
US7666513B2Feb 23, 2010
Adhesive of a silicon and silica composite for bonding together silicon parts
INTEGRATED MATERIALS INC11 citations82
US6727191B2Apr 27, 2004
High temperature hydrogen anneal of silicon wafers supported on a silicon fixture
INTEGRATED MATERIALS INC12 citations72
US7137546B2Nov 21, 2006
Silicon tube formed of bonded staves
INTEGRATED MATERIALS INC6 citations71
US7083694B2Aug 1, 2006
Adhesive of a silicon and silica composite particularly useful for joining silicon parts
INTEGRATED MATERIALS INC9 citations71
US7108746B2Sep 19, 2006
Silicon fixture with roughened surface supporting wafers in chemical vapor deposition
INTEGRATED MATERIALS INC7 citations70
US7074693B2Jul 11, 2006
Plasma spraying for joining silicon parts
INTEGRATED MATERIALS INC4 citations61
US7854974B2Dec 21, 2010
Tube formed of bonded silicon staves
INTEGRATED MATERIALS INC3 citations59
US7611989B2Nov 3, 2009
Polysilicon dummy wafers and process used therewith
INTEGRATED MATERIALS INC3 citations58
US7736747B2Jun 15, 2010
Silicon parts joined by a silicon layer preferably plasma sprayed
INTEGRATED MATERIALS INC1 citations51