Inventor
KIM KEON-YOUNG
KR2 patents
Patents
2 patentsUS9530670B2Dec 27, 2016
Methods of forming conductive patterns and methods of manufacturing semiconductor devices using the same using an etchant composition that includes phosphoric acid, nitric acid, and an assistant oxidant
SAMSUNG ELECTRONICS CO LTD8 citations81
US10995269B2May 4, 2021
Etchant composition and method of fabricating integrated circuit device using the same
SAMSUNG ELECTRONICS CO LTD1 citations61