Inventor
WIBERG DEAN
US3 patents
Patents
3 patentsUS6281494B1Aug 28, 2001
Miniature micromachined quadrupole mass spectrometer array and method of making the same
CALIFORNIA INST OF TECHN39 citations94
US6188067B1Feb 13, 2001
Miniature micromachined quadrupole mass spectrometer array and method of making the same
CALIFORNIA INST OF TECHN54 citations94
US6157029ADec 5, 2000
Miniature micromachined quadrupole mass spectrometer array and method of making the same
CALIFORNIA INST OF TECHN58 citations94