Inventor
KLOOSTER ALEX
US6 patents
⚠️ This page may combine multiple inventors who share the name “KLOOSTER ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SENTEC CORP
3 patentsUS5923423AJul 13, 1999
Heterodyne scatterometer for detecting and analyzing wafer surface defects
SENTEC CORP162 citations96
US6868736B2Mar 22, 2005
Ultra-miniature optical pressure sensing system
SENTEC CORP96 citations95
US6597446B2Jul 22, 2003
Holographic scatterometer for detection and analysis of wafer surface deposits
SENTEC CORP39 citations90