Inventor
CHARNESKI LAWRENCE J
US28 patents
⚠️ This page may combine multiple inventors who share the name “CHARNESKI LAWRENCE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHARP LAB OF AMERICA INC
20 patentsUS5939334AAug 17, 1999
System and method of selectively cleaning copper substrate surfaces, in-situ, to remove copper oxides
SHARP LAB OF AMERICA INC126 citations99
US6596344B2Jul 22, 2003
Method of depositing a high-adhesive copper thin film on a metal nitride substrate
SHARP LAB OF AMERICA INC16 citations93
US5948467ASep 7, 1999
Enhanced CVD copper adhesion by two-step deposition process
SHARP LAB OF AMERICA INC50 citations93
US7098101B1Aug 29, 2006
Method of forming PrxCa1−xMnO3 thin films having a PrMnO3/CaMnO3 super lattice structure using metalorganic chemical vapor deposition
SHARP LAB OF AMERICA INC14 citations84
US6972239B1Dec 6, 2005
Low temperature MOCVD processes for fabrication of PrXCa1-xMnO3 thin films
SHARP LAB OF AMERICA INC13 citations84
US6090960AJul 18, 2000
Precursor with (methoxy) (methyl) silylolefin ligand to deposit copper and method same
SHARP LAB OF AMERICA INC16 citations84
US5994571ANov 30, 1999
Substituted ethylene precursor and synthesis method
SHARP LAB OF AMERICA INC17 citations84
US7235407B2Jun 26, 2007
System and method for forming a bipolar switching PCMO film
SHARP LAB OF AMERICA INC7 citations74
US6764537B2Jul 20, 2004
Copper metal precursor
SHARP LAB OF AMERICA INC5 citations74
US6555916B2Apr 29, 2003
Integrated circuit prepared by selectively cleaning copper substrates, in-situ, to remove copper oxides
SHARP LAB OF AMERICA INC5 citations74
US6284052B2Sep 4, 2001
In-situ method of cleaning a metal-organic chemical vapor deposition chamber
SHARP LAB OF AMERICA INC12 citations74
US6281377B1Aug 28, 2001
Substituted cycloalkene new copper precursors for chemical vapor deposition of copper metal thin films
SHARP LAB OF AMERICA INC8 citations74
US6281589B1Aug 28, 2001
System of selectively cleaning copper substrate surfaces, in-situ, to remove copper oxides
SHARP LAB OF AMERICA INC9 citations74
US6245261B1Jun 12, 2001
Substituted phenylethylene precursor and synthesis method
SHARP LAB OF AMERICA INC8 citations74
US6218734B1Apr 17, 2001
Copper adhered to a diffusion barrier surface
SHARP LAB OF AMERICA INC9 citations74
US6002176ADec 14, 1999
Differential copper deposition on integrated circuit surfaces
SHARP LAB OF AMERICA INC10 citations74
US7759150B2Jul 20, 2010
Nanorod sensor with single-plane electrodes
SHARP LAB OF AMERICA INC4 citations63
US7696550B2Apr 13, 2010
Bipolar switching PCMO capacitor
SHARP LAB OF AMERICA INC2 citations63
US6204176B1Mar 20, 2001
Substituted phenylethylene precursor deposition method
SHARP LAB OF AMERICA INC4 citations63
US6669870B2Dec 30, 2003
Substituted phenylethylene precursor synthesis method
SHARP LAB OF AMERICA INC0 citations52
SHARP MICROELECT TECH INC
5 patentsUS5909637AJun 1, 1999
Copper adhesion to a diffusion barrier surface and method for same
SHARP MICROELECT TECH INC24 citations93
US5851367ADec 22, 1998
Differential copper deposition on integrated circuit surfaces and method for same
SHARP MICROELECT TECH INC20 citations93
US5744192AApr 28, 1998
Method of using water vapor to increase the conductivity of cooper desposited with cu(hfac)TMVS
SHARP MICROELECT TECH INC54 citations93
US5767301AJun 16, 1998
Precursor with (alkyloxy)(alkyl)-silylolefin ligand to deposit copper
SHARP MICROELECT TECH INC40 citations92
US5913144AJun 15, 1999
Oxidized diffusion barrier surface for the adherence of copper and method for same
SHARP MICROELECT TECH INC53 citations90
ADVANCED TECH MATERIALS
3 patentsUS6284652B1Sep 4, 2001
Adhesion promotion method for electro-chemical copper metallization in IC applications
ADVANCED TECH MATERIALS35 citations89
US6645860B2Nov 11, 2003
Adhesion promotion method for CVD copper metallization in IC applications
ADVANCED TECH MATERIALS7 citations74
US6355562B1Mar 12, 2002
Adhesion promotion method for CVD copper metallization in IC applications
ADVANCED TECH MATERIALS13 citations74