Inventor

LAN CHUN-FA

TW2 patents

Patents

2 patents

US7329364B2Feb 12, 2008

Method for manufacturing bonded wafer with ultra-thin single crystal ferroelectric film

IND TECH RES INST4 citations56

US9649740B1May 16, 2017

Vibration assistant polishing module

IND TECH RES INST0 citations35