Inventor

TSAI CHIH-PIN

TW2 patents

Patents

2 patents

US9752057B2Sep 5, 2017

CMP method for suppression of titanium nitride and titanium/titanium nitride removal

CABOT MICROELECTRONICS CORP3 citations66

US9803109B2Oct 31, 2017

CMP composition for silicon nitride removal

CABOT MICROELECTRONICS CORP2 citations64