Inventor

PENMETHSA HARISH VARMA

US2 patents

Patents

2 patents

US9932668B2Apr 3, 2018

Physical vapor deposition system using backside gas cooling of workpieces

TANGO SYSTEMS INC2 citations62

US10550464B2Feb 4, 2020

Physical vapor deposition method using backside gas cooling of workpieces

TANGO SYSTEMS INC0 citations43