Inventor · disambiguated record
Harshal T. Vasa
Also filed as: VASA HARSHAL T
2 granted patents·2 citations·filing 2015–2018
39Inventor score
Technology areasH01J
Files withTANGO SYSTEMS INC2
Top patents by PatentIndex Score
2 records- 0171US9932668B2Physical vapor deposition system using backside gas cooling of workpiecesTANGO SYSTEMS INC·Filed 2015·Granted Apr 3, 2018·2 cites·9 claims
- 0253US10550464B2Physical vapor deposition method using backside gas cooling of workpiecesTANGO SYSTEMS INC·Filed 2018·Granted Feb 4, 2020·0 cites·8 claims
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