Inventor
LEE KYUN PHYO
KR2 patents
Patents
2 patentsUS9996007B2Jun 12, 2018
Polymer for preparing resist underlayer film, resist underlayer film composition containing the polymer and method for manufacturing semiconductor device using the composition
SK INNOVATION CO LTD3 citations69
US10227450B2Mar 12, 2019
Polymer for preparing resist underlayer film, resist underlayer film composition containing the polymer and method for manufacturing semiconductor device using the composition
SK INNOVATION CO LTD0 citations37