Inventor
TODD MICHAEL A
US48 patents
⚠️ This page may combine multiple inventors who share the name “TODD MICHAEL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
26 patentsUS6962859B2Nov 8, 2005
Thin films and method of making them
ASM INC113 citations99
US6958253B2Oct 25, 2005
Process for deposition of semiconductor films
ASM INC75 citations99
US6900115B2May 31, 2005
Deposition over mixed substrates
ASM INC122 citations99
US6821825B2Nov 23, 2004
Process for deposition of semiconductor films
ASM INC311 citations99
US6743738B2Jun 1, 2004
Dopant precursors and processes
ASM INC599 citations99
US7297641B2Nov 20, 2007
Method to form ultra high quality silicon-containing compound layers
ASM INC625 citations98
US7186630B2Mar 6, 2007
Deposition of amorphous silicon-containing films
ASM INC70 citations98
US7964513B2Jun 21, 2011
Method to form ultra high quality silicon-containing compound layers
ASM INC75 citations97
US7651953B2Jan 26, 2010
Method to form ultra high quality silicon-containing compound layers
ASM INC79 citations97
US6716713B2Apr 6, 2004
Dopant precursors and ion implantation processes
ASM INC56 citations97
US7273799B2Sep 25, 2007
Deposition over mixed substrates
ASM INC19 citations96
US7186582B2Mar 6, 2007
Process for deposition of semiconductor films
ASM INC18 citations96
US7026219B2Apr 11, 2006
Integration of high k gate dielectric
ASM INC55 citations96
US6716751B2Apr 6, 2004
Dopant precursors and processes
ASM INC42 citations96
US7285500B2Oct 23, 2007
Thin films and methods of making them
ASM INC14 citations93
US7585752B2Sep 8, 2009
Process for deposition of semiconductor films
ASM INC9 citations92
US7029995B2Apr 18, 2006
Methods for depositing amorphous materials and using them as templates for epitaxial films by solid phase epitaxy
ASM INC39 citations91
US6858196B2Feb 22, 2005
Method and apparatus for chemical synthesis
ASM INC18 citations84
US7005160B2Feb 28, 2006
Methods for depositing polycrystalline films with engineered grain structures
ASM INC18 citations83
US8360001B2Jan 29, 2013
Process for deposition of semiconductor films
ASM INC3 citations74
US7893433B2Feb 22, 2011
Thin films and methods of making them
ASM INC5 citations74
US7253084B2Aug 7, 2007
Deposition from liquid sources
ASM INC7 citations74
US7547615B2Jun 16, 2009
Deposition over mixed substrates using trisilane
ASM INC0 citations63
US7921805B2Apr 12, 2011
Deposition from liquid sources
ASM INC0 citations52
US7790556B2Sep 7, 2010
Integration of high k gate dielectric
ASM INC0 citations52
US7674728B2Mar 9, 2010
Deposition from liquid sources
ASM INC0 citations52
ASM JAPAN
8 patentsUS6630413B2Oct 7, 2003
CVD syntheses of silicon nitride materials
ASM JAPAN162 citations99
US6458718B1Oct 1, 2002
Fluorine-containing materials and processes
ASM JAPAN275 citations99
US7425350B2Sep 16, 2008
Apparatus, precursors and deposition methods for silicon-containing materials
ASM JAPAN88 citations98
US6825130B2Nov 30, 2004
CVD of porous dielectric materials
ASM JAPAN23 citations93
US6733830B2May 11, 2004
Processes for depositing low dielectric constant materials
ASM JAPAN21 citations93
US7144620B2Dec 5, 2006
Process for depositing low dielectric constant materials
ASM JAPAN7 citations74
US6905981B1Jun 14, 2005
Low-k dielectric materials and processes
ASM JAPAN8 citations69
US7544827B2Jun 9, 2009
Process for depositing low dielectric constant materials
ASM JAPAN0 citations52
ADVANCED TECH MATERIALS
5 patentsUS6319565B1Nov 20, 2001
Stable hydride source compositions for manufacture of semiconductor devices and structures
ADVANCED TECH MATERIALS25 citations92
US6146608ANov 14, 2000
Stable hydride source compositions for manufacture of semiconductor devices and structures
ADVANCED TECH MATERIALS39 citations92
US6005127ADec 21, 1999
Antimony/Lewis base adducts for Sb-ion implantation and formation of antimonide films
ADVANCED TECH MATERIALS42 citations92
US6001172ADec 14, 1999
Apparatus and method for the in-situ generation of dopants
ADVANCED TECH MATERIALS35 citations92
US6767830B2Jul 27, 2004
Br2SbCH3 a solid source ion implant and CVD precursor
ADVANCED TECH MATERIALS8 citations71
TODD MICHAEL A
4 patentsUS4333562AJun 8, 1982
Capsule for storing written information
TODD MICHAEL A37 citations92
US8921205B2Dec 30, 2014
Deposition of amorphous silicon-containing films
TODD MICHAEL A6 citations83
US8088223B2Jan 3, 2012
System for control of gas injectors
TODD MICHAEL A14 citations82
US8067297B2Nov 29, 2011
Process for deposition of semiconductor films
TODD MICHAEL A0 citations62