Inventor
HINATA KUNIHIKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HINATA KUNIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7951262B2May 31, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD486 citations99
US7988816B2Aug 2, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD63 citations97
US6159862ADec 12, 2000
Semiconductor processing method and system using C5 F8
TOKYO ELECTRON LTD86 citations94
US7882800B2Feb 8, 2011
Ring mechanism, and plasma processing device using the ring mechanism
TOKYO ELECTRON LTD31 citations92
US7740737B2Jun 22, 2010
Plasma processing apparatus and method
TOKYO ELECTRON LTD25 citations92
US6465359B2Oct 15, 2002
Etchant for use in a semiconductor processing method and system
TOKYO ELECTRON LTD22 citations91
US9490105B2Nov 8, 2016
Plasma processing apparatus and method
TOKYO ELECTRON LTD6 citations84
US10854431B2Dec 1, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10546727B2Jan 28, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10529539B2Jan 7, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD0 citations52