Inventor
KIBI KAZUO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KIBI KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7951262B2May 31, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD486 citations99
US7988816B2Aug 2, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD63 citations97
US7740737B2Jun 22, 2010
Plasma processing apparatus and method
TOKYO ELECTRON LTD25 citations92
US9490105B2Nov 8, 2016
Plasma processing apparatus and method
TOKYO ELECTRON LTD6 citations84
US10854431B2Dec 1, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10546727B2Jan 28, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US11501998B2Nov 15, 2022
Method for manufacturing three-dimensional semiconductor memory device
TOKYO ELECTRON LTD0 citations62
US11282753B2Mar 22, 2022
Method of simultaneously forming contacts to a power rail and the source and drain regions of a FinFET
TOKYO ELECTRON LTD0 citations62
US12100616B2Sep 24, 2024
Method of manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations57
US10529539B2Jan 7, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD0 citations52