Inventor
YANO DAISUKE
JP15 patents
⚠️ This page may combine multiple inventors who share the name “YANO DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7951262B2May 31, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD486 citations99
US7988816B2Aug 2, 2011
Plasma processing apparatus and method
TOKYO ELECTRON LTD63 citations97
US7740737B2Jun 22, 2010
Plasma processing apparatus and method
TOKYO ELECTRON LTD25 citations92
US9490105B2Nov 8, 2016
Plasma processing apparatus and method
TOKYO ELECTRON LTD6 citations84
US10854431B2Dec 1, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10546727B2Jan 28, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD2 citations73
US10529539B2Jan 7, 2020
Plasma processing apparatus and method
TOKYO ELECTRON LTD0 citations52