Inventor
JIN WEN
US20 patents
⚠️ This page may combine multiple inventors who share the name “JIN WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7372583B1May 13, 2008
Controlling a fabrication tool using support vector machine
TOKYO ELECTRON LTD22 citations92
US7567352B2Jul 28, 2009
Controlling a fabrication tool using support vector machine
TOKYO ELECTRON LTD10 citations84
US9059038B2Jun 16, 2015
System for in-situ film stack measurement during etching and etch control method
TOKYO ELECTRON LTD5 citations71
US9490183B2Nov 8, 2016
Nondestructive inline X-ray metrology with model-based library method
TOKYO ELECTRON LTD2 citations63
US7630873B2Dec 8, 2009
Approximating eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer
TOKYO ELECTRON LTD4 citations63
US8381140B2Feb 19, 2013
Wide process range library for metrology
TOKYO ELECTRON LTD3 citations62
US7483809B2Jan 27, 2009
Optical metrology using support vector machine with profile parameter inputs
TOKYO ELECTRON LTD1 citations52
US7511835B2Mar 31, 2009
Optical metrology using a support vector machine with simulated diffraction signal inputs
TOKYO ELECTRON LTD0 citations42
JIN WEN
4 patentsUSD721548SJan 27, 2015
Juice extractor
JIN WEN30 citations93
US8577820B2Nov 5, 2013
Accurate and fast neural network training for library-based critical dimension (CD) metrology
JIN WEN8 citations83
US8452718B2May 28, 2013
Determination of training set size for a machine learning system
JIN WEN9 citations83
US9607265B2Mar 28, 2017
Accurate and fast neural network training for library-based critical dimension (CD) metrology
JIN WEN5 citations72