Inventor
DELARIOS JOHN
US12 patents
⚠️ This page may combine multiple inventors who share the name “DELARIOS JOHN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS7007333B1Mar 7, 2006
System and method for a combined contact and non-contact wafer cleaning module
LAM RES CORP25 citations92
US6949411B1Sep 27, 2005
Method for post-etch and strip residue removal on coral films
LAM RES CORP15 citations84
US6729339B1May 4, 2004
Method and apparatus for cooling a resonator of a megasonic transducer
LAM RES CORP13 citations84
US7329321B2Feb 12, 2008
Enhanced wafer cleaning method
LAM RES CORP13 citations83
US7743449B2Jun 29, 2010
System and method for a combined contact and non-contact wafer cleaning module
LAM RES CORP7 citations73
US7568488B2Aug 4, 2009
Enhanced wafer cleaning method
LAM RES CORP3 citations62
US6851436B1Feb 8, 2005
Substrate processing using a fluid re-circulation system in a wafer scrubbing system
LAM RES CORP5 citations61
US6857435B2Feb 22, 2005
Method and apparatus for cooling a resonator of a megasonic transducer
LAM RES CORP1 citations52