Inventor
SHANG YAO-YUAN
TW9 patents
Patents
9 patentsUS10345716B2Jul 9, 2019
Metrology method in reticle transportation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11742227B2Aug 29, 2023
Wafer cleaning system and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10515833B2Dec 24, 2019
Wafer cleaning system and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US9919350B2Mar 20, 2018
Cup-wash device, semiconductor apparatus, and cup cleaning method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US12087602B2Sep 10, 2024
Wafer cleaning method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11387123B2Jul 12, 2022
Metrology method in wafer transportation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9770092B2Sep 26, 2017
Brush, back surface treatment assembly and method for cleaning substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10651066B2May 12, 2020
Metrology method in wafer transportation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9570334B2Feb 14, 2017
Method and system for positioning wafer in semiconductor manufacturing fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations42