Inventor
COLINJIVADI KARTHIK S
US3 patents
Patents
3 patentsUS11670516B2Jun 6, 2023
Metal-containing passivation for high aspect ratio etch
LAM RES CORP3 citations72
US11062897B2Jul 13, 2021
Metal doped carbon based hard mask removal in semiconductor fabrication
LAM RES CORP4 citations67
US12249514B2Mar 11, 2025
Carbon based depositions used for critical dimension control during high aspect ratio feature etches and for forming protective layers
LAM RES CORP0 citations57