Inventor

MCNAB SHAREE JANE

NZ3 patents

⚠️ This page may combine multiple inventors who share the name “MCNAB SHAREE JANE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

2 patents

US7696057B2Apr 13, 2010

Method for co-alignment of mixed optical and electron beam lithographic fabrication levels

IBM2 citations58

US7550361B2Jun 23, 2009

Trench structure and method for co-alignment of mixed optical and electron beam lithographic fabrication levels

IBM0 citations37

FRIED DAVID MICHAEL

1 patent

US8120138B2Feb 21, 2012

High-Z structure and method for co-alignment of mixed optical and electron beam lithographic fabrication levels

FRIED DAVID MICHAEL0 citations41